High-sensitivity, miniature triaxial K-Beam® MEMS capacitive accelerometer family for vehicle dynamics, structural analysis and NVH

Kistler, worldwide supplier of precision sensors, systems and instrumentation for the dy- namic measurement of pressure, force, torque and acceleration, has announced the launch of the Type 8395A..., a miniature, cube-shaped, high-sensitivity, low-noise triaxial MEMS capacitive accelerometer series, incorporating Kistler's own K-Beam technology. The Type 8395A... is designed to simultaneously measure acceleration and low-frequency vibration in three mutually perpendicular axes (x, y and z) within a variety of automotive, aerospace, OEM, R&D and general laboratory test applications.

The Kistler Type 8395A... series is available in six different models, with measurement ranges from ±2 ... ±200 g and a frequency response of 0 ... 1000 Hz (5 %). The compact design provides a 0,85 inch (21,6 mm) cube footprint and incorporates a MEMS variable capacitance sensing element, consisting of a small inertial mass and flexure element sand- wiched between two parallel plates. As the mass deflects under acceleration, the capaci- tance between the element and plates changes, which is converted to a proportional voltage by the internal analog signal conditioner. The output signal format of the Type 8395A... series is bipolar at 0 ±4 V and provides a high-sensitivity, low-noise signal, which is com- patible with a wide variety of data acquisition or readout devices. The accelerometer is shock rated to 6 000 g pk. Sensing elements and integral electronics are housed within a lightweight, welded titanium housing with a specially designed miniature circular 9-pin con- nector for a fully hermetic design.

The Kistler Type 8395A... triaxial capacitive MEMS accelerometer series offers excellent thermal stability and reliable performance over an operating temperature range of –65 ... 250 F (–55 ... 125 °C). It is powered by a single wide range supply between 6 ... 50 VDC and has an internal voltage regulator. In the event that external temperature compensation is desired, a temperature output is provided, in addition to the output signals. Ground isolation is obtained by mounting the sensor using one of the off-ground accesso- ries or by adhesively mounting the sensor to the test object using the side of the sensor with the integral hard anodized plate. Optional accessories for the Type 8395A... series include adhesive, magnetic or off-ground mounting bases; a triaxial mounting cube; and various breakout, extension and output cabling options.

As an instrument-grade accelerometer series, the Kistler Type 8395A... is suitable for use in a multitude of R&D and OEM applications where high-precision, low-frequency measure- ments and high-durability packaging are absolute requirements. Typical applications include aerospace ground vibration testing; flight test; structural dynamics and vibration assess- ments; automotive laboratory testing and vehicle ride assessments; structural integrity test- ing of bridges and other civil structures; seismic ground testing; and R&D applications, such as human motion studies, robotics and platform motion control systems, among others.